It is popular practice to aluminise and pre-coat the substrate material (generally a nickel or cobalt superalloy) with an MCrAlY bond-coat. The bond-coat is necessary to accommodate residual stresses that might otherwise develop in the coating system, caused by the metallic substrate and the ceramic TBC having different coefficients of thermal expansion.

ceramic coatings," "high-temperature corrosion," "plasma spray," "CVD chambers," "PVD chambers.

KERN Y2O3 thermal spray powders resist plasma erosion, protect semiconductor etch chambers, extend overhaul cycles to 6 months, and prevent wafer contamination.

Dense yttrium oxyfluoride (YOF) coating was successfully deposited by suspension plasma
spraying (SPS) with coaxial feeding. After deposition for 6 min at a plasma power of 105 kW,
the thickness of the YOF coating was 35±3um with a porosity of 0.15% ± 0.01% and the coating rate
was ~9.2 um/min. The crystalline structure of trigonal YOF was confirmed by X-ray diractometry
(XRD). The etching behavior of the YOF coating was studied using inductively coupled CHF3/Ar
plasma in comparison with those of the Al2O3 bulk and Y2O3 coating. Crater-like erosion sites and
cavities were formed on the whole surface of the Al2O3 bulk and Y2O3 coating. In contrast, the
surface of the YOF coating showed no noticeable dierence before and after exposure to the CHF3/Ar
plasma. Such high resistance of the YOF coating to fluorocarbon plasma comes from the strongly
fluorinated layer on the surface. The fluorination on the surface of materials was confirmed by X-ray
photoelectron spectrum analysis XPS

Discover CrownRe's breakthrough YAG topcoat for thermal barrier coatings, offering superior high-temperature stability and CMAS resistance. Engineered for extreme durability with HVOF spray technology.