CrownRe is developing kinds of YOF for plasma spray coating with high purity;
The YOF film surface was stable against these plasmas containing hydrogen,Nitrogen,Oxygen and fluorine. Especially, the stability of YOF against fluoridation was better than that of Y2O3,which is currently widely applied as the protective materials in plasma process chambers.
An Yttrium oxyfluoride YOF protective materials was developed for the inner wall of plasma process equipment. Using microwave-excited surface-wave high-density plasma equipment,the chemical stability of the obtained YOF films was evaluted by exposure to H2/Ar,Na/Ar,O2/Ar,and NF3/Ar plasmas.